Crystallite size-dependent metastable phase formation of TiAlN coatings

A STUDY OF TiAlN COATINGS PREPARED BY RF CO-SPUTTERING

Using the reactive magnetron rf co-sputtering technique and a Ti target partially covered with a small Al plate, TiAlN coatings were made on c-Si in a reactive atmosphere of nitrogen and argon. Coatings were deposited on substrates at 22°C and at 150°C. The substrate temperature notably affected the thickness, crystalline grain size, and hardness of the coatings. We analyzed the dependence of b...

Phase Stability and Elasticity of TiAlN

We review results of recent combined theoretical and experimental studies of Ti1-xAlxN, an archetypical alloy system material for hard-coating applications. Theoretical simulations of lattice parameters, mixing enthalpies, and elastic properties are presented. Calculated phase diagrams at ambient pressure, as well as at pressure of 10 GPa, show a wide miscibility gap and broad region of composi...

Modeling of metastable phase formation diagrams for sputtered thin films

A method to model the metastable phase formation in the Cu-W system based on the critical surface diffusion distance has been developed. The driver for the formation of a second phase is the critical diffusion distance which is dependent on the solubility of W in Cu and on the solubility of Cu in W. Based on comparative theoretical and experimental data, we can describe the relationship between...

Crystallite Size Measurement Using X- Ray Diffraction

Mike Meier University of California, Davis September 13, 2004 Figure 1. FEG-SEM image of nanosized aluminum oxide powder. Note the magnification and the size of the micron bar. Also note how the smaller particles and the edges of the larger particles appear to be somewhat transparent. This is because much of the 5 kV electron beam can pass through these thinner parts of the particles. CRYSTALLI...

Determination of Crystallite Size with the XRay Spectrometer